Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Sergey Okishev"'
Autor:
Irina Livshits, Sergey Okishev, Nenad Zoric, M. V. Letunovskaya, R. V. Anitropov, E.A. Somova
Publikováno v:
Scientific and Technical Journal of Information Technologies, Mechanics and Optics. :234-241
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6d5a5d66611b023a1b2189ee97c408fd
https://doi.org/10.17586/2226-1494-2017-17-2-234-241
https://doi.org/10.17586/2226-1494-2017-17-2-234-241
Publikováno v:
Advanced Optical Technologies. 6:31-38
This paper describes a method for designing an ultraviolet (UV) projection lens for microlithography. Our approach for meeting this objective is to use a starting design automatically obtained by the DSEARCH feature in the SYNOPSYS™ lens design pro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2e748d8f3392a461cdb4d577cd866d78
https://doi.org/10.1515/aot-2016-0058
https://doi.org/10.1515/aot-2016-0058
Publikováno v:
SPIE Proceedings.
Aberration vignetting phenomena changes light distribution in the image plane. A method of physically accurate simulation of this effect in optical devices is presented. We modified a stochastic ray tracing technique to use it for the analysis and vi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ce4febdeb42106c15cb87041b7af3ae
https://doi.org/10.1117/12.2246087
https://doi.org/10.1117/12.2246087