Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Sergey N. Zaretskiy"'
Autor:
Hai-Won Kim, Shin Seung-Woo, Jeong Choon-Sik, Wooduck Jung, Hwang Han-Na, Ryong Hwang, Ilsub Chung, Park Seong-Jin, Sergey N. Zaretskiy
Publikováno v:
ECS Transactions. 53:321-329
We have researched low temperature silicon oxide (SiO2) with improved electrical properties and excellent film step-coverage. In-situ O2 plasma densification (DENSIFICATION) effect on SiO2 that has been deposited by PE-ALD at temperature (2 network d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::faf75247093147642c9816e16a74e3c0
https://doi.org/10.1149/05301.0321ecst
https://doi.org/10.1149/05301.0321ecst
Publikováno v:
Chemical Physics Letters. 372:300-305
Carbon nanotubes (CNTs) were grown from Co nanoparticles by thermal chemical vapor deposition using C 2 H 2 , H 2 , and Ar gases. The diameters of CNTs were limited by the sizes of the catalytic Co nanoparticles. From 5 nm Co nanoparticles, very long
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::730ed3ea2cdabcf3db35cea29c8b02b5
https://doi.org/10.1016/s0009-2614(03)00405-6
https://doi.org/10.1016/s0009-2614(03)00405-6