Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Sergey N. Averkin"'
Autor:
Sergey N. Averkin
Publikováno v:
2020 IEEE International Conference on Plasma Science (ICOPS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1fc4d90ac31fd23ab2f58868150040c9
https://doi.org/10.1109/icops37625.2020.9717765
https://doi.org/10.1109/icops37625.2020.9717765
Autor:
Thomas G. Jenkins, Sergey N. Averkin
Publikováno v:
2020 IEEE International Conference on Plasma Science (ICOPS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::91365f93f09b9251c50b2c0e520d160b
https://doi.org/10.1109/icops37625.2020.9717857
https://doi.org/10.1109/icops37625.2020.9717857
Publikováno v:
International Conference on Micro- and Nano-Electronics 2018.
Present paper overviews existent and newly developed DSE technologies offering optimal choice for specific demands. Under consideration there are four types of deep silicon etching processes: cyclic original Bosch process and modified one, continuous
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b8178f6d0099c4ae01ab5b1089fcf80
https://doi.org/10.1117/12.2522505
https://doi.org/10.1117/12.2522505
Publikováno v:
2018 IEEE International Conference on Plasma Science (ICOPS).
We present recent developments of a multi-weight collision method for the direct simulation Monte Carlo (DSMC) and collisional particle-in-cell (PIC) methods that have been widely used to simulate gases and partially-ionized plasmas. Single-weight me
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d8104c837ace227a0524a316726db828
https://doi.org/10.1109/icops35962.2018.9575344
https://doi.org/10.1109/icops35962.2018.9575344