Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Sergey G. Belostotskiy"'
Autor:
Laurent Vallier, Jeremiah T. Pender, Nicolas Posseme, C. Mannequin, Olivier Joubert, Sergey G. Belostotskiy, Srinivas D. Nemani, S. Banola, Christophe Licitra, Chia-Ling Kao, Camille Petit-Etienne, Patrice Gonon
Publikováno v:
2013 IEEE International Interconnect Technology Conference - IITC.
Today porous SiOCH combined with metallic hard masking strategy is an integration of choice for advanced BEOL interconnect technology node. However in this context the main integration issue is the dielectric film sensitivity to fluorocarbon (FC) etc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9b1ba81425219a1b1a62eb6628e86937
https://doi.org/10.1109/iitc.2013.6615591
https://doi.org/10.1109/iitc.2013.6615591
Publikováno v:
Journal of Physics D: Applied Physics
Journal of Physics D: Applied Physics, IOP Publishing, 2011, 44, pp.5202. ⟨10.1088/0022-3727/44/14/145202⟩
Journal of Physics D: Applied Physics, IOP Publishing, 2011, 44, pp.5202. ⟨10.1088/0022-3727/44/14/145202⟩
Time- and space-resolved measurements of Ar(1s5) metastable (Ar*) density were carried out in a pulsed dc argon microplasma discharge, using diode laser absorption spectroscopy. The temporal behaviour of metastable density after discharge turn off (i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0aea7cf73f62d0bd181340aa5c332ffd
https://hal.archives-ouvertes.fr/hal-01005944
https://hal.archives-ouvertes.fr/hal-01005944
Autor:
Kenneth S. Collins, Gonzalo Antonio Monroy, Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Sergey G. Belostotskiy
Publikováno v:
IEEE Transactions on Plasma Science. 42:2584-2585
Immersing a hollow cathode into a magnetic field enhances trapping of fast cathode electrons and ionization, providing ~30% decrease in the discharge voltage for a given current. The nonuniform magnetic field in our electron source causes an intricat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f38493f28d27c433590af0a148164242
https://doi.org/10.1109/tps.2014.2351409
https://doi.org/10.1109/tps.2014.2351409
Publikováno v:
IEEE Transactions on Plasma Science
IEEE Transactions on Plasma Science, Institute of Electrical and Electronics Engineers, 2009, 37, pp.852-858. ⟨10.1109/TPS.2009.2015949⟩
IEEE Transactions on Plasma Science, Institute of Electrical and Electronics Engineers, 2009, 37, pp.852-858. ⟨10.1109/TPS.2009.2015949⟩
Tunable diode laser absorption spectroscopy was employed to measure the spatially resolved density of argon metastables (1s5) in a high-pressure direct-current argon microdischarge. Analysis of absorption lineshapes provided the gas temperature. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::757328eca674316d1fe68e460f9432e1
https://hal.archives-ouvertes.fr/hal-01005908
https://hal.archives-ouvertes.fr/hal-01005908
Publikováno v:
Journal of Physics: Conference Series
Journal of Physics: Conference Series, IOP Publishing, 2010, 227, pp.2011. ⟨10.1088/1742-6596/227/1/012011⟩
Journal of Physics: Conference Series, IOP Publishing, 2010, 227, pp.2011. ⟨10.1088/1742-6596/227/1/012011⟩
International audience; Laser scattering experiments were performed in high pressure (100s of Torr) parallel-plate, slot-type DC microdischarges operating in argon or nitrogen. Laser Thomson Scattering (LTS) and Rotational Raman Scattering were emplo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cb62142584521dab8b7f084a5bb1bf7c
https://doi.org/10.1088/1742-6596/227/1/012011
https://doi.org/10.1088/1742-6596/227/1/012011
Publikováno v:
Journal of Applied Physics
Journal of Applied Physics, American Institute of Physics, 2010, 107, pp.3305. ⟨10.1063/1.3318498⟩
Journal of Applied Physics, American Institute of Physics, 2010, 107, pp.3305. ⟨10.1063/1.3318498⟩
International audience; Optical emisssion spectroscopy was employed to study a high pressure (100 s of Torr), slot-type (600 μm interelectrode gap), argon dc microdischarge, with added traces of nitrogen. Spatially resolved gas temperature profiles
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0f111a7c1980b62fb01c328e26ffd938
https://doi.org/10.1063/1.3318498
https://doi.org/10.1063/1.3318498
Publikováno v:
Plasma Sources Science and Technology. 17:045018
Experimental I?V characteristics of dc microdischarges in helium at different operating pressures (p = 300?800?Torr) reveal that the classical scaling law of the cathode layer (sheath) does not apply. It is shown that a modified semi-analytical model
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b12d5a6c4028120f0ca69e6b86e3c480
https://doi.org/10.1088/0963-0252/17/4/045018
https://doi.org/10.1088/0963-0252/17/4/045018
Autor:
Vincent M. Donnelly, Nader Sadeghi, Qiang Wang, Sergey G. Belostotskiy, Rahul Khandelwal, Demetre J. Economou
Publikováno v:
Applied Physics Letters. 92:221507
Laser Thomson scattering in a novel, backscattered configuration was employed to measure the electron temperature (Te) and electron density (ne) in argon dc microdischarges, with an interelectrode gap of 600μm. Measurements were performed at the cen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66a933ecbed0923fd48f3714d31eaa9c
https://doi.org/10.1063/1.2939437
https://doi.org/10.1063/1.2939437
Publikováno v:
Journal of Physics D: Applied Physics; Apr2011, Vol. 44 Issue 14, p145202-145202, 1p