Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Sergey A. Demidovich"'
Autor:
Natalya S. Kovalchuk, Yuliya A. Marudo, Anna A. Omelchenko, Uladzimir A. Pilipenka, Vitali A. Saladukha, Sergey A. Demidovich, Vladimir V. Kolos, Victor M. Anishchik, Viktar A. Filipenia, Dmitry V. Shestovski
Publikováno v:
Journal of the Belarusian State University. Physics. :80-87
The charge properties of thin dielectrics, obtained by rapid thermal processing (RTP), and their interfaces with silicon for MOS transistors are investigated. The production of insulator layers was carried out by a two- or three-stage RTP with photon
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea06ab94a93eea768098f40834f074d9
https://doi.org/10.33581/2520-2243-2022-1-80-87
https://doi.org/10.33581/2520-2243-2022-1-80-87
Autor:
Irina N. Parkhomenko, Dmitry V. Shestovski, Sergey A. Demidovich, I. A. Romanov, Uladzimir A. Pilipenka, Vitali A. Saladukha, N. S. Kovalchuk, Liudmila Vlasukova
Publikováno v:
Journal of the Belarusian State University. Physics. :26-31
Emission of the silicon oxide films grown on Si by wet thermal oxidation at 900 °С and by plasma-enhanced chemical vapor deposition from the SiH4 + N2O mixture at 350 °С has been compared using electroluminescence. The electroluminescence spectra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::522594c62dc2cf913c3d723651c537d8
https://doi.org/10.33581/2520-2243-2021-3-26-31
https://doi.org/10.33581/2520-2243-2021-3-26-31