Zobrazeno 1 - 10
of 103
pro vyhledávání: '"Seong-Woon Choi"'
Publikováno v:
Journal of Clinical Medicine, Vol 10, Iss 2179, p 2179 (2021)
Journal of Clinical Medicine
Volume 10
Issue 10
Journal of Clinical Medicine
Volume 10
Issue 10
Background: Papillary thyroid cancer (PTC) has the highest cancer incidence in Korea. It is known that some thyroid cancers have aggressive clinical behavior and a poor prognosis. Genomic studies have described some somatic mutations that are related
Publikováno v:
Annals of Hepato-Biliary-Pancreatic Surgery
Backgrounds/Aims: The aim of this study was to identify the risk factors of the development of large amounts of ascites (LA) after hepatic resection for hepatocellular carcinoma (HCC). Methods: The medical records of 137 consecutive patients who unde
Publikováno v:
Journal of Endocrine Surgery. 20:69
Autor:
Bong Hoon Kim, Sang Chul Jeon, Seok-Hwan Oh, Seung Hak Park, Kyoung-seon Kim, Si Yong Lee, Dong Ki Yoon, Sang Ouk Kim, Dong Ok Shin, Seong-Woon Choi
Publikováno v:
Soft Matter. 6:120-125
We present block copolymer multiple patterning as an efficient and truly scalable nanolithography for sub-20 nm scale patterning, synergistically integrated with conventional ArF lithography. The directed assembly of block copolymers on chemically pa
Publikováno v:
Microelectronic Engineering. 53:287-290
Multiple scattering effect is discussed with a low voltage e-beam system. A test layout is designed to figure out the multiple scattering effect. A dark erosion is studied to identify the scattering range. The range is found to be as far as ~15mm wit
Autor:
Seung-Hune Yang, Dmitry Vengertsev, Jung-Dal Choi, Ki-Hyun Kim, Sooryong Lee, Seongbo Shim, Artem Shamsuarov, Seong-Woon Choi, Ho-Kyu Kang, Seongho Moon
Publikováno v:
SPIE Proceedings.
Model-based Optical Proximity Correction (OPC) is widely used in advanced lithography processes. The OPC model contains an empirical part, which is calibrated by fitting the model with data from test patterns. Therefore, the success of the OPC model
Publikováno v:
SPIE Proceedings.
A negative tone development (NTD) process has been considered as apromising candidate for the smaller contact solution due to the remarkable image quality over a positive tone develop (PTD) process. However, it has not been investigated why NTD has h
Autor:
Thomas Schmöller, Young-Chang Kim, Bernd Küchler, John Lewellen, Seung-Hune Yang, Eun-Ju Kim, Chang-Jin Kang, Seongho Moon, Ulrich Klostermann, Junghoon Ser, Sooryong Lee, Seong-Woon Choi, Artem Shamsuarov
Publikováno v:
SPIE Proceedings.
In this paper, we discuss the accuracy of resist model calibration under various aspects. The study is done based on an extensive OPC dataset including hundreds of CD values obtained with immersion lithography for the sub-30 nm node. We address imagi
Autor:
Tom Cecil, Chang-Jin Kang, Hyun-Jong Lee, Junghoon Ser, Christopher Ashton, David Kim, Xin Zhou, Guangming Xiao, Sung-Gon Jung, Donghwan Son, Seong-Woon Choi, Woojoo Sim, David Irby, Sungsoo Suh
Publikováno v:
SPIE Proceedings.
For low k1 lithography the resolution of critical patterns on large designs can require advanced resolution enhancement techniques for masks including scattering bars, complicated mask edge segmentation and placement, etc. Often only a portion of a l
Autor:
Sooryoung Lee, Seongbo Shim, Seong-Woon Choi, Young-Hee Kim, Seongho Moon, Munhoe Do, Ulrich Klostermann, Bernd Küchler, Young-Chang Kim
Publikováno v:
SPIE Proceedings.
In this paper, we introduce a rigorous OPC technology that links the physical lithography simulation with the OPC. Firstly, the various aspects of the rigorous OPC, related to process flow, are discussed and the practical feasibility of the embedded