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pro vyhledávání: '"Seok-Hyun Lim"'
Autor:
Gyung-jin Min, Seok-Hyun Lim, Chul-Ho Shin, Sung-Chan Park, Chang-Jin Kang, Han-Ku Cho, Joo-Tae Moon
Publikováno v:
Thin Solid Films. 515:4923-4927
In this study, etching characteristics of oval-shaped contact were investigated. The oval-shaped contact showed different etching characteristics compared to the circular contact. The long axis cross-section of oval-shaped contact showed a more verti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f5985dbeb64eb0e21503c7f72c8be93d
https://doi.org/10.1016/j.tsf.2006.10.063
https://doi.org/10.1016/j.tsf.2006.10.063
