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pro vyhledávání: '"Seok-Ho Joo"'
Autor:
Yoon-Jong Song, Jung-Hoon Park, Hyunho Kim, Nak-Won Jang, Sung-young Lee, Seok-Ho Joo, Seung-Kuk Kang, Kinam Kim, H. J. Joo
Publikováno v:
Japanese Journal of Applied Physics. 43:2199
Since ferroelectric capacitors prepared by 1-mask etching are degraded after the etching, we systematically investigated the origin of the degradation. It was found that the major degradation originates from the formation of the nonstoichiometric and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28ed7466e828e55eba1f4ff66d2df59d
https://doi.org/10.1143/jjap.43.2199
https://doi.org/10.1143/jjap.43.2199
