Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Seng Kee Wee"'
Autor:
Roy Mizrahi, Hong Kia Ang, Khor Wui Cheng, Ronnie Porat, Seng Kee Wee, Wi Hoong Lim, Kian Boon Tan, Kok Hui Lim, Jessica Zhang, Qin Deng, Guy Gichon, Kia Kearn Chng
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Bitline contact misalignment has a negative impact on yield in 20nm and sub-20nm NAND technology, which is typically worse at a wafer's edge than at its center. We hypothesized that photo critical dimensions (CD) and/or registration issues were contr
Autor:
Hong Kia Ang, Kok Hui Lim, Qin Deng, Kian Boon Tan, Wi Hoong Lim, Zhang, Jessica, Porat, Ronnie, Kia Kearn Chng, Seng Kee Wee, Khor Wui Cheng, Gichon, Guy, Mizrahi, Roy
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2015, p255-259, 5p