Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Seng Chi Lee"'
Publikováno v:
Journal of Materials Science: Materials in Electronics. 21:270-277
In this paper, highly crystallized silicon films can be obtained by using a new metal-mediated mechanism. In this method, the infrared radiation was absorbed by a reusable metal-coated plate and then the photon energy was converted into heat. The tra
Publikováno v:
Journal of Materials Science: Materials in Electronics; Mar2010, Vol. 21 Issue 3, p270-277, 8p, 3 Diagrams, 1 Chart, 7 Graphs
Publikováno v:
Japanese Journal of Applied Physics. 44:7319
A new crystallization technique for crystallizing amorphous silicon (a-Si) film with a low thermal budget is proposed. A highly crystalline polycrystalline silicon (poly-Si) film can be rapidly obtained on a low-cost glass substrate by this technique