Zobrazeno 1 - 1
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pro vyhledávání: '"Sen Kai Chen"'
Publikováno v:
Advanced Materials Research. 1027:240-245
For subsurface crack detection of single crystal SiC wafer, this paper proposed a cross-sectional cleavage detection method and compared with traditional cross-sectional sample preparation method. The characteristics and detection results of two cros
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8780e84d037b54d6b0b89c5fb5a9964f
https://doi.org/10.4028/www.scientific.net/amr.1027.240
https://doi.org/10.4028/www.scientific.net/amr.1027.240
