Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Selman Tamer"'
Autor:
Maarten van Es, Selman Tamer, Elin Bloem, Laurent Fillinger, Elfi van Zeijl, Klára Maturová, Jacques van der Donck, Rob Willekers, Adam Chuang, Diederik Maas
Publikováno v:
Micro and Nano Engineering, Vol 19, Iss , Pp 100181- (2023)
Patterning photoresist with extreme control over dose and placement is the first crucial step in semiconductor manufacturing. However, how can the activation of modern complex resist components be accurately measured at sufficient spatial resolution?
Externí odkaz:
https://doaj.org/article/0653850e95f944f287663f12ba7a92af
Autor:
Maarten H. van Es, Mehmet Selman . Tamer, Robbert Bloem, Elfi van Zeijl, Jacques C. J. Verdonck, Adam Chuang, Diederik J. Maas
Publikováno v:
Advances in Patterning Materials and Processes XXXIX.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3618f2492d91d16ae0a535be047cb236
https://doi.org/10.1117/12.2614293
https://doi.org/10.1117/12.2614293
Autor:
Fred van Keulen, Aliasghar Keyvani, Hamed Sadeghian, Gijs van der Veen, Hans Goosen, Mehmet Selman Tamer
Publikováno v:
IEEE Transactions on Nanotechnology. 19:274-283
The real-time and accurate measurement of tip-sample interaction forces in Tapping Mode Atomic Force Microscopy (TM-AFM) is a remaining challenge. This obstruction fundamentally stems from the causality of the physical systems. Since i) the input of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7dd6f64c6c6dd500a409e982a2404ddd
https://doi.org/10.1109/tnano.2020.2974177
https://doi.org/10.1109/tnano.2020.2974177
Autor:
Mehmet Selman Tamer, M.H. van Es, K. Hatakeyama, D. Piras, P.L.M.J. van Neer, B.A.J. Quesson, M.C.J.M. van Riel
Publikováno v:
2021 IEEE International Ultrasonics Symposium (IUS).
Several methods are being researched to detect and characterize buried nanoscale structures in hard solid samples. The most common acoustic method is acoustic microscopy. An acoustic microscope is based on a single element transducer operating in pul
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2bd5568ae6476ed583b4ba4430a401e
https://doi.org/10.1109/ius52206.2021.9593305
https://doi.org/10.1109/ius52206.2021.9593305
Autor:
Marco v. d. Lans, Mehmet Selman Tamer, Maarten H. van Es, Hamed Sadeghian, Martijn van Riel, Maarten E. v. Reijzen, Aliasghar Keyvani
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIII
In this paper, we present an AFM based subsurface measurement technique that can be used for overlay and critical dimensions (CD) measurements through optically opaque layers. The proposed method uses the surface elasticity map to resolve the presenc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1eded0c6350c7efaeeb736426f3bf2e8
https://doi.org/10.1117/12.2515441
https://doi.org/10.1117/12.2515441
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXII.
Image Based Overlay (IBO) measurement is one of the most common techniques used in Integrated Circuit (IC) manufacturing to extract the overlay error values. The overlay error is measured using dedicated overlay targets which are optimized to increas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::04acd30bedba500d56f2094e49704dd1
https://doi.org/10.1117/12.2302959
https://doi.org/10.1117/12.2302959
Autor:
Hamed Sadeghian, Aliasghar Keyvani, Fred van Keulen, Johannes F.L. Goosen, Mehmet Selman Tamer
Publikováno v:
Journal of applied physics, 121
Journal of Applied Physics, 121
Journal of Applied Physics, 121
Due to the harmonic motion of the cantilever in Tapping Mode Atomic Force Microscopy, it is seemingly impossible to estimate the tip-sample interactions from the motion of the cantilever. Not directly observing the interaction force, it is possible t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b91040bd2eefabbe8bf696bb89f486e9
http://resolver.tudelft.nl/uuid:c8b50fb2-8b93-4763-8fc6-6b0f05c48e0f
http://resolver.tudelft.nl/uuid:c8b50fb2-8b93-4763-8fc6-6b0f05c48e0f
Autor:
Oguzhan Gurlu, Huzeyfe Yilmaz, Mehmet Selman Tamer, Hasan Yilmaz, Ali Serpengüzel, Mohammed Sharif Murib
Publikováno v:
Optical Engineering
The effect of the discrete values of the refractive index of the surrounding medium on the spectral behavior of the whispering-gallery modes (WGMs) in the elastic scattering spectra of high-refractive-index silica microspheres submerged in fluids, su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4d20dc3490368f7b00dc681a22218f5f
http://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/4677
http://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/4677
Publikováno v:
SPIE Proceedings.
In this paper we present a new AFM based nano-patterning technique that can be used for fast defect repairing of high resolution photomasks and possibly other high-speed nano-patterning applications. The proposed method works based on hammering the s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a1df8dbddfa8664ea7c9847540870b3f
https://doi.org/10.1117/12.2219041
https://doi.org/10.1117/12.2219041
Publikováno v:
Integrated Photonics: Materials, Devices, And Applications
Optical resonances are observed in the elastic light scattering form high refractive index glass microspheres placed on a single mode optical fiber coupler and in a liquid crystal. Placing the liquid crystal on the optical fiber coupler increases the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1cbf5d1d9223f11a0b04931a46408693
https://doi.org/10.1117/12.887635
https://doi.org/10.1117/12.887635