Zobrazeno 1 - 1
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pro vyhledávání: '"Self assembled monolayer adsorption"'
Publikováno v:
Journal of Applied Physics. 97:114309
We report the results of a study into the factors controlling the quality of nanolithographic imaging. Self-assembled monolayer (SAM) coverage, subsequent postetch pattern definition, and minimum feature size all depend on the quality of the Au subst