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pro vyhledávání: '"Sein Kwon"'
Autor:
Sein Kwon, Jonggon Yang
Publikováno v:
The Korean Academic Association of Business Administration. 35:1161-1186
Publikováno v:
Journal of Korean Alcohol Science. 21:31-43
Publikováno v:
ETRI Journal. 31:703-708
Silicon antimony films are studied as resistors for uncooled microbolometers. We present the fabrication of silicon films and their alloy films using sputtering and plasma-enhanced chemical vapor deposition. The sputtered silicon antimony films show
Publikováno v:
ETRI Journal; 2009, Vol. 31 Issue 6, p703-708, 6p, 2 Color Photographs, 1 Diagram, 3 Charts, 4 Graphs