Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer

Autor: Luca Belsito, Bahram Azizollah Ganji, Alberto Roncaglia, Sedighe Babaei Sedaghat

Publikováno v: Solid-state electronics 148 (2018): 27–34. doi:10.1016/j.sse.2018.07.004
info:cnr-pdr/source/autori:Ganji, Bahram Azizollah; Sedaghat, Sedighe Babaei; Roncaglia, Alberto; Belsito, Luca/titolo:Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer/doi:10.1016%2Fj.sse.2018.07.004/rivista:Solid-state electronics/anno:2018/pagina_da:27/pagina_a:34/intervallo_pagine:27–34/volume:148

This paper will focus on design, fabrication and characterization of a new MEMS capacitive microphone with the perforated diaphragm supported by Z-shape arms using SOI wafer. The aim is to fabricate a new microphone with the smallest size, simple and

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::989b1a8d653031051af4a2e69e087908
https://doi.org/10.1016/j.sse.2018.07.004

Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Autor: Luca Belsito, Bahram Azizollah Ganji, Alberto Roncaglia, Sedighe Babaei Sedaghat

Publikováno v: Microsystem technologies 24 (2018): 3133–3140. doi:10.1007/s00542-018-3816-3
info:cnr-pdr/source/autori:Ganji, Bahram Azizollah; Sedaghat, Sedighe Babaei; Roncaglia, Alberto; Belsito, Luca/titolo:Design and fabrication of high performance condenser microphone using C-slotted diaphragm/doi:10.1007%2Fs00542-018-3816-3/rivista:Microsystem technologies/anno:2018/pagina_da:3133/pagina_a:3140/intervallo_pagine:3133–3140/volume:24

In this paper, we present a new design of MEMS condenser microphone using SOI wafer. To improve the performance of the microphone, a perforated diaphragm with C-shape slots has been designed. The aim is to achieve high sensitivity, low voltage and sm

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::869e7607ab47ddc1cb7c2c265009eb0f
https://doi.org/10.1007/s00542-018-3816-3

Design and modeling of a highly sensitive microelectromechanical system capacitive microphone

Autor: Sedighe Babaei Sedaghat, Bahram Azizollah Ganji

Publikováno v: Journal of Micro/Nanolithography, MEMS, and MOEMS. 19:1

A single-chip microelectromechanical system (MEMS) capacitive microphone is designed and modeled. The mechanical model of the structure is extracted and the mathematical equations for a description of the microphone behavior are obtained. Then the pr

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7cb0fdaac5b36d3f50d1bb2e628b99bb
https://doi.org/10.1117/1.jmm.19.2.025001

Design, modeling, and fabrication of crab-shape capacitive microphone using silicon-on-isolator wafer

Autor: Luca Belsito, Alberto Roncaglia, Bahram Azizollah Ganji, Reza Ansari, Sedighe Babaei Sedaghat

Publikováno v: Journal of micro/nanolithography, MEMS, and MOEMS 17 (2018). doi:10.1117/1.JMM.17.1.015002
info:cnr-pdr/source/autori:Ganji, Bahram Azizollah; Sedaghat, Sedighe Babaei; Roncaglia, Alberto; Belsito, Luca; Ansari, Reza/titolo:Design, modeling, and fabrication of crab-shape capacitive microphone using silicon-on-isolator wafer/doi:10.1117%2F1.JMM.17.1.015002/rivista:Journal of micro%2Fnanolithography, MEMS, and MOEMS/anno:2018/pagina_da:/pagina_a:/intervallo_pagine:/volume:17

This paper presents design, modeling, and fabrication of a crab-shape microphone using silicon-on-isolator (SOI) wafer. SOI wafer is used to prevent the additional deposition of sacrificial and diaphragm layers. The holes have been made on diaphragm

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::074c13d2b9082e18d801841752874d7e
https://doi.org/10.1117/1.jmm.17.1.015002