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pro vyhledávání: '"Sebastian Couet"'
Autor:
Massimo Mongillo, Frederic Lazzarino, Sebastian Couet, Jeroen Verjauw, Tsvetan Ivanov, J. Jussot, Danny Wan, X. Piao, Y. Canvel, Bogdan Govoreanu, Iuliana Radu, Diziana Vangoidsenhoven, Diana Tsvetanova, A. Thiam, Laurent Souriau, A. Potocnik, Rohith Acharya, Antoine Pacco
Publikováno v:
Japanese Journal of Applied Physics. 60:SBBI04
We present the development of Nb/Al–AlO x /Nb trilayer stacks and the implementation of a full 300 mm process flow for the fabrication of trilayer-based superconducting qubits. Room temperature electrical characterization of tens of thousands of Jo