Zobrazeno 1 - 2
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pro vyhledávání: '"Sean McVey"'
Publikováno v:
Microscopy and Microanalysis. 16:599-603
The scanning helium ion microscope has been used in transmission mode to investigate both the feasibility of this approach and the utility of the signal content and the image information available. Operating at 40 keV the penetration of the ion beam,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::912284254d8f7b2d299decbba9f195cd
https://doi.org/10.1017/s1431927610093682
https://doi.org/10.1017/s1431927610093682
Autor:
Michael T. Postek, Andras E. Vladar, John Kramar, Lewis A. Stern, John Notte, Sean McVey, David G. Seiler, Alain C. Diebold, Robert McDonald, C. Michael Garner, Dan Herr, Rajinder P. Khosla, Erik M. Secula
Publikováno v:
AIP Conference Proceedings.
The Helium Ion Microscope (HIM) offers a new, potentially disruptive technique for nano‐metrology. This methodology presents an approach to measurements for nanotechnology and nano‐manufacturing which has several potential advantages over the tra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96419dc615d2076e4053fb182b5ecf51
https://doi.org/10.1063/1.2799363
https://doi.org/10.1063/1.2799363