Zobrazeno 1 - 1
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pro vyhledávání: '"Scott W. Rader"'
Publikováno v:
MRS Proceedings. 732
Barrier CMP can reduce the topography generated during Cu CMP. In case of selective barrier CMP slurry like 1:10:1, it is expected that the topography reduction could not exceed the Ta thickness. Some recent observations made at Fujimi show that the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf91cfaae1b67ff7580fcb771ea3553c
https://doi.org/10.1557/proc-732-i4.5
https://doi.org/10.1557/proc-732-i4.5
