Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Scott Seo"'
Autor:
Sivakumar Venkat, Ja-Chun Ku, Yong Shin, Carlotte Douglas, Scott Seo, SungKi Park, Jason Saito, Byeong-Sam Moon, KeunSu Kim, William Shen, Jeong-Hoon An, Hyo Sik Suh, Jonggeun Park, Jiae Kim, Sanghyun Lee
Publikováno v:
ECS Transactions. 16:321-329
This paper talks about a new class of yield impacting defect types known as polishing induced defects (PID) on polished silicon substrates. These defects were found to cause significant yield drop associated with a pump bias failure in the sub-60nm f
Autor:
Hyo Sik Suh, Byeongsam Moon, KeunSu Kim, Jiae Kim, Sivakumar Venkat, Sanghyun Lee, William Shen, Yong Shin, Jonggeun Park, Jeonghoon An, Scott Seo, SungKi Park
Publikováno v:
ECS Meeting Abstracts. :2012-2012
not Available.