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pro vyhledávání: '"Scott Samson"'
Akademický článek
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Publikováno v:
Journal of the Australian Ceramic Society; Dec2023, Vol. 59 Issue 5, p1399-1410, 12p
Akademický článek
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Publikováno v:
Journal of the Australian Ceramic Society; December 2023, Vol. 59 Issue: 5 p1399-1410, 12p
Publikováno v:
Journal of Microelectromechanical Systems. 24:1632-1641
We present a free space optical communication system that uses electrostatically modulated microelectromechanical systems (MEMS) structures coupled with a glass total internal reflection-type corner cube retroreflector (CCR) as a nonemitting data tra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09145a58ef6f2e6f9f324877b94ad8c5
https://doi.org/10.1109/jmems.2015.2428275
https://doi.org/10.1109/jmems.2015.2428275
Publikováno v:
Applied Physics B. 105:833-837
Near-field evanescent wave coupling of various subwavelength grating pairs, using a 1.55 μm infrared semiconductor laser has been demonstrated for use as an optical MEMS sensor. Subwavelength grating pairs were fabricated on both glass and silicon s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd1dde483005ade700812f10ff7316a2
https://doi.org/10.1007/s00340-011-4712-z
https://doi.org/10.1007/s00340-011-4712-z
Publikováno v:
ECS Transactions. 2:19-26
A new approach to etch structures with vertical sidewalls in Si is presented. This process reduces the loading effect in Deep Reactive Ion Etching (DRIE) and maintains uniform etch profile and etch rate through out the wafer. Rectangular areas were p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b2bcf0ade9614f790d0c72e5bac47e1f
https://doi.org/10.1149/1.2409014
https://doi.org/10.1149/1.2409014
Fabrication of Integrated Vertical Mirror Surfaces and Transparent Window for Packaging MEMS Devices
Publikováno v:
Journal of Microelectromechanical Systems. 16:122-129
A scheme for creating metal-coated vertical mirrors in silicon, along with an integrated transparent package lid for assembling, packaging, and testing microelectromechanical systems (MEMS) devices is presented. Deep reaction ion etching (DRIE) metho
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::478276a267ad5056e8c58362854ff7b5
https://doi.org/10.1109/jmems.2006.886010
https://doi.org/10.1109/jmems.2006.886010
Publikováno v:
IEEE Journal of Oceanic Engineering. 31:728-735
In marine biology study, it is important to investigate the distribution of plankton organisms. Because of the overwhelming data size, automatic processing of the large amount of image data collected by underwater image recorders becomes inevitable.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::97d9fc19619223b9dc54ae51cb6ae31d
https://doi.org/10.1109/joe.2004.836995
https://doi.org/10.1109/joe.2004.836995