Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Scott G. Rauscher"'
Publikováno v:
Sensors and Actuators A: Physical. 269:474-482
The use of electrical contact resistance (ECR) is investigated as a force sensing mechanism in silicon-on-insulator DRIE MEMS devices. Using both direct mechanical and indirect inertial loading, ECR relationships were evaluated for high aspect ratio
Autor:
Vicky Taffoti Fondjo, Franklin Fondjo Fotou, Daniel L. Jean, Muhammad Khan, Scott G. Rauscher, Oliver M. Barham
Publikováno v:
Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems.
MEMS diaphragms utilizing an embedded cantilever array to sense pressure were investigated in an effort to detect blast-induced loads that potentially cause mild traumatic brain injury (mTBI). Overhanging cantilever beams of varying length sequential