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Autor:
John Sylvestri, Larry Fischer, Sweta Pendyala, Scott Dinkel, T. Kane, S.B. Ippolito, Rich Oldrey, Manuel Villalobos, Bruce J. Redder, Michael P. Tenney, Pat McGinnis, Darrell L. Miles
Publikováno v:
International Symposium for Testing and Failure Analysis.
This paper describes novel concepts in equipment and measurement techniques that integrate optical electrical microscopy and scanning probe microscopy (SPM) capabilities into a single tool under the umbrella of optical nanoprobe electrical (ONE) micr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7d99ae7facc8c5b65889803e1b0bd886
https://doi.org/10.31399/asm.cp.istfa2013p0208
https://doi.org/10.31399/asm.cp.istfa2013p0208
