Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Scott C. Beeler"'
Publikováno v:
SIAM Journal on Applied Mathematics. 62:1251-1280
This paper describes the development of a reduced order model-based feedback control methodology for regulation of the growth of thin films in a high-pressure chemical vapor deposition (HPCVD) reactor. Precise control of the film thickness and compos
Publikováno v:
Applied Surface Science. 178:63-74
The understanding of thin film growth processes and their control requires the development of surface-sensitive real-time optical characterization techniques that are able to provide insight into the surface reaction kinetics during an organometallic
Publikováno v:
Journal of Optimization Theory and Applications. 107:1-33
A number of computational methods have been proposed in the literature to design and synthesize feedback controls when the plant is modeled by nonlinear dynamics. However, it is not immediately clear which is the best method for a given problem; this
Publikováno v:
Journal of Applied Physics. 86:674-682
This contribution presents results on the parameter estimation of rate constants and optical response factors in a reduced order surface kinetics (ROSK) model, which has been developed to describe the decomposition kinetics of the organometallic prec
Autor:
Klaus J. Bachmann, Scott C. Beeler, Harvey Thomas Banks, C. Höpfner, N. Sukidi, Hien T. Tran, Kazufumi Ito, Christopher Harris, Nikolaus Dietz
Publikováno v:
Journal of Crystal Growth. 183:323-337
The structure in the p-polarized reflectance (PR) intensity R p4 ( t ) - observed under conditions of pulsed chemical beam epitaxy (PCBE) - is modeled on the basis of the four-layer stack: ambient/surface reaction layer (SRL)/epilayer/substrate. Line
Autor:
U. Rossow, C. Höpfner, Christopher Harris, Amy E. Miller, Hien T. Tran, Nikolaus Dietz, Harvey Thomas Banks, N. Sukidi, Scott C. Beeler, Klaus J. Bachmann, Kazufumi Ito, David E. Aspnes
Publikováno v:
Applied Surface Science. 112:38-47
In this paper we consider modern methods of optical process monitoring and control in the context of atomic layer epitaxy. One specific method, p-polarized reflectance spectroscopy (PRS), is chosen to assess details of layer-by-layer growth. We show
Publikováno v:
Control and Estimation of Distributed Parameter Systems ISBN: 9783034893992
In this paper state estimation and feedback tracking control methods for nonlinear systems are presented. The methods, which are based on the “state-dependent Riccati equation”, allow the construction of nonlinear estimators and nonlinear feedbac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::852a99c806c3bd6a433de05fe5f26902
https://doi.org/10.1007/978-3-0348-8001-5_1
https://doi.org/10.1007/978-3-0348-8001-5_1