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Publikováno v:
Microelectronics Reliability. 45:47-56
In these experiments, we explored various methods of nitridation of thermal oxide. Rapid thermal oxidation (RTO), rapid thermal oxidation with nitric oxide (RTNO), remote plasma nitridation (RPN), and decoupled plasma nitridation (DPN) processes were
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::edba94207e05d36d28ecae0c758e31ef
https://doi.org/10.1016/j.microrel.2004.02.016
https://doi.org/10.1016/j.microrel.2004.02.016
