Zobrazeno 1 - 10
of 515
pro vyhledávání: '"Scholze, Frank"'
Publikováno v:
Journal of Applied Physics; 6/14/2024, Vol. 135 Issue 22, p1-9, 9p
Autor:
Andrle, Anna, Hönicke, Philipp, Schneider, Philipp, Kayser, Yves, Hammerschmidt, Martin, Burger, Sven, Scholze, Frank, Beckhoff, Burkhard, Soltwisch, Victor
Publikováno v:
Proc. SPIE 11057, 110570M (2019)
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which is taking
Externí odkaz:
http://arxiv.org/abs/2104.13749
Autor:
Saadeh, Qais, Naujok, Philipp, Philipsen, Vicky, Hönicke, Philipp, Laubis, Christian, Buchholz, Christian, Andrle, Anna, Stadelhoff, Christian, Mentzel, Heiko, Schönstedt, Anja, Soltwisch, Victor, Scholze, Frank
The optical constants of ruthenium in the spectral range 8 nm to 23.75 nm with their corresponding uncertainties are derived from the reflectance of a sputtered ruthenium thin film in the Extreme Ultraviolet (EUV) spectral range measured using monoch
Externí odkaz:
http://arxiv.org/abs/2103.11868
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of n
Externí odkaz:
http://arxiv.org/abs/2103.03334
Autor:
Hönicke, Philipp, Andrle, Anna, Kayser, Yves, Nikolaev, Konstantin V., Probst, Jürgen, Scholze, Frank, Soltwisch, Victor, Weimann, Thomas, Beckhoff, Burkhard
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional recons
Externí odkaz:
http://arxiv.org/abs/2005.02078
Autor:
Pint, Anna, Hildebrandt, Anke, Landwehrs, Jan, Feulner, Georg, Scholze, Frank, Nyakatura, John, Ispas, Leon, Grützner, Christoph, Frenzel, Peter
Publikováno v:
In Palaeogeography, Palaeoclimatology, Palaeoecology 15 October 2023 628
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the pe
Externí odkaz:
http://arxiv.org/abs/1907.05307
Autor:
Pflüger, Mika, Soltwisch, Victor, Xavier, Jolly, Probst, Jürgen, Scholze, Frank, Becker, Christiane, Krumrey, Michael
Publikováno v:
J. Appl. Cryst. 52, 322-331. (2019)
In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic structures produced by nanoimprint lithography. The photonic structure
Externí odkaz:
http://arxiv.org/abs/1903.08101
Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electronic circuits. For the control of the lithographic manufacturing proce
Externí odkaz:
http://arxiv.org/abs/1810.08011
Autor:
Saadeh, Qais, Naujok, Philipp, Thakare, Devesh, Wu, Meiyi, Philipsen, Vicky, Scholze, Frank, Buchholz, Christian, Salami, Zanyar, Abdulhadi, Yasser, García, Danilo Ocaña, Mentzel, Heiko, Babuschkin, Anja, Laubis, Christian, Soltwisch, Victor
Publikováno v:
In Optik February 2023 273