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pro vyhledávání: '"Schneidwind, Henrik"'
Autor:
Wang, Wei, Hübner, Uwe, Chen, Tao, Gärtner, Anne, Köbel, Joseph, Jahn, Franka, Schneidwind, Henrik, Dellith, Andrea, Dellith, Jan, Wieduwilt, Torsten, Zeisberger, Matthias, Shaik, Tanveer Ahmed, Bingel, Astrid, Schmidt, Markus A, Huang, Jer-Shing, Deckert, Volker
The rise of micro/nanooptics and lab-on-chip devices demands the fabrication of three-dimensional structures with decent resolution. Here, we demonstrate the combination of grayscale electron beam lithography and direct forming methodology to fabrica
Externí odkaz:
http://arxiv.org/abs/2401.13427