Zobrazeno 1 - 10
of 38
pro vyhledávání: '"Scheiter, T"'
Autor:
Hierold, C a, *, Clasbrummel, B b, Behrend, D c, Scheiter, T a, Steger, M a, Oppermann, K a, Kapels, H a, Landgraf, E a, Wenzel, D b, Etzrodt, D c
Publikováno v:
In Sensors & Actuators: A. Physical 1999 73(1):58-67
Publikováno v:
3D Systems Integration Conference (3DIC), 2010 IEEE International; 2010, p1-7, 7p
Publikováno v:
1999 Symposium on VLSI Circuits Digest of Papers (IEEE Cat No99CH36326); 1999, p161-164, 4p
Publikováno v:
Proceedings of the 24th European Solid-State Circuits Conference; 1998, p324-327, 4p
Autor:
Hierold, C., Hildebrandt, A., Naher, U., Scheiter, T., Mensching, B., Steger, M., Tielert, R.
Publikováno v:
Proceedings of Ninth International Workshop on Micro Electromechanical Systems; 1996, p174-179, 6p
Autor:
Hierold, C., Clasbrumme, B., Behrend, D., Scheiter, T., Steger, M., Oppermann, K., Kapels, H., Landgraf, E., Wenzel, D., Etuodt, D.
Publikováno v:
Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176; 1998, p568-573, 6p
Publikováno v:
Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176; 1998, p550-555, 6p
Publikováno v:
Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p220-223, 4p
Publikováno v:
ESSDERC '94: 24th European Solid State Device Research Conference; 1994, p399-402, 4p
Publikováno v:
IEEE Journal of Solid-State Circuits; Jul1999, Vol. 34 Issue 7, p978-984, 7p