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pro vyhledávání: '"Satoshi Tokai"'
Autor:
Satoshi Tokai, Takahiko Yanagitani
Publikováno v:
Applied Physics Express, Vol 17, Iss 2, p 025501 (2024)
In solidly mounted resonator (SMR) type of bulk acoustic wave resonator, it is difficult to fabricate single crystalline piezoelectric thin films in a bottom-up process due to the amorphous SiO _2 in the low acoustic impedance layer of the acoustic B
Externí odkaz:
https://doaj.org/article/ff4d7de95dca48ce8399768b625d45ff
Publikováno v:
2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a0cc131bec702e3278eddb29a5f3a4d5
https://doi.org/10.1109/ic-mam55200.2022.9855309
https://doi.org/10.1109/ic-mam55200.2022.9855309