Zobrazeno 1 - 10
of 27
pro vyhledávání: '"Satoshi Hamaoka"'
Publikováno v:
Journal of Applied Physics; 2014, Vol. 116 Issue 8, p084311-1-084311-6, 6p, 4 Diagrams, 3 Graphs
Publikováno v:
Microsystem Technologies. 22:1181-1188
Design principles of lateral-deflection-controlled friction force microscopy (FFM) are presented. Lateral-deflection-controlled FFM can overcome a fundamental problem of dual-axis FFM and can provide higher lateral resolution by compensating for fric
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f398764725fb28d20a38e7b037f46b4
https://doi.org/10.1007/s00542-015-2807-x
https://doi.org/10.1007/s00542-015-2807-x
Autor:
Yosuke Niimi, Tomoaki Sugino, Mitsuhiro Shikida, Kenji Fukuzawa, Tatsuya Hasegawa, Satoshi Hamaoka
Publikováno v:
Microsystem Technologies. 21:661-668
Mechanical strengthening of a Si cantilever by applying KOH wet etching was investigated. Two kinds of Si cantilever specimens having the different crystallographic orientations of the sidewall surfaces, i.e., Si{100} and Si{110}, were fabricated fro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b454757d244cae4efbd69fb341bc33c
https://doi.org/10.1007/s00542-014-2075-1
https://doi.org/10.1007/s00542-014-2075-1
Autor:
Kenji Fukuzawa, Shintaro Itoh, Hedong Zhang, Hiroaki Tsuji, Satoshi Hamaoka, Mitsuhiro Shikida
Publikováno v:
Microsystem Technologies. 19:1567-1572
It is important to understand friction force in micro/nano mechanical devices both at high sliding speed and with high lateral resolution. Dual-axis friction force microscopes that can provide high lateral resolution and accuracy have been proposed;
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::82c2e6db000e425112a1350787fa93a0
https://doi.org/10.1007/s00542-013-1861-5
https://doi.org/10.1007/s00542-013-1861-5
Autor:
Yosuke Niimi, Satoshi Hamaoka, Tomoaki Sugino, Kenji Fukuzawa, Mitsuhiro Shikida, Tatsuya Hasegawa
Publikováno v:
2013 IEEE SENSORS.
The effect of applying KOH wet etching on the fracture strength of a Si cantilever and the mechanism of its mechanical strengthening were investigated. Cantilever specimens with a sidewall surface of Si{100} or Si{110} were produced by a Bosch proces
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b15e9138adb62ff2633de343e1ebe42b
https://doi.org/10.1109/icsens.2013.6688568
https://doi.org/10.1109/icsens.2013.6688568
Publikováno v:
Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE. 2015:TuB-1
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c732e4d4fac3ef9f9279b34f67f7a30c
https://doi.org/10.1299/jsmemipe.2015._tub-1-1-1
https://doi.org/10.1299/jsmemipe.2015._tub-1-1-1
Publikováno v:
Journal of Applied Physics. 116:084311
Lateral-deflection-controlled dual-axis friction force microscopy (FFM) is presented. In this method, an electrostatic force generated with a probe-incorporated micro-actuator compensates for friction force in real time during probe scanning using fe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac09609e24053e36fbf8d928c3a5363a
https://doi.org/10.1063/1.4894250
https://doi.org/10.1063/1.4894250
Publikováno v:
The Proceedings of Mechanical Engineering Congress, Japan. 2014:J1640204
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c858624274ebb925b581b9223a23b6ad
https://doi.org/10.1299/jsmemecj.2014._j1640204-
https://doi.org/10.1299/jsmemecj.2014._j1640204-
Publikováno v:
The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP. 2014:E-2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e8be366bb9f44ca01cca2dc2d0831ff
https://doi.org/10.1299/jsmeiip.2014._e-2-2-1_
https://doi.org/10.1299/jsmeiip.2014._e-2-2-1_
Autor:
Yosuke Niimi, Satoshi Hamaoka, Tomoaki Sugino, Mitsuhiro Shikida, Tatsuya Hasegawa, Kenji Fukuzawa
Publikováno v:
The Proceedings of Mechanical Engineering Congress, Japan. 2013:J212026-1
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::542a3fbfd5700fc3e53b2cdb11a5d4a3
https://doi.org/10.1299/jsmemecj.2013._j212026-1
https://doi.org/10.1299/jsmemecj.2013._j212026-1