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pro vyhledávání: '"Sasitharan Nair Dass"'
Autor:
Sasitharan Nair Dass, Chin Jeng Feng
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 35:87-101
Wafer fabrication (Wafer Fab) involves state-of-the-art, expensive, and highly complex processes, and only little is known about its change qualification, a process that follows a strict guideline to ensure that changes will affect neither the proces
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::68ce2fa7f2ac5329461761bf91de0be6
https://doi.org/10.1109/tsm.2021.3125032
https://doi.org/10.1109/tsm.2021.3125032
