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pro vyhledávání: '"Sashi Kumar Gn"'
Publikováno v:
Journal of Chemical Engineering & Process Technology.
A majority of vacuum processes use the Thermal Mass Flow Meter (TMFM) as metering device for process gas. The purpose of this paper is to establish cross compatibility relationship of the TMFM with different process gases. This paper uses a compressi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ebb06f380c39b3544e7eca8b65560e08
https://doi.org/10.4172/2157-7048.s1-002
https://doi.org/10.4172/2157-7048.s1-002
