Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Sarah J. Lukes"'
Autor:
Brandon Huntley, Tiphani Lynn, James Dilts, Demi St. John, Daniel Traucht, Sarah Mondl, Sarah J. Lukes
Publikováno v:
Applied Industrial Optics 2019.
We present the evolution of initial imaging experiments and micro-electro-mechanical systems mirrors toward a commercialized product. Feasibility of 10-mm-diameter freestanding SU-8 deformable mirrors for achieving fast focus and zoom in microscopy i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d2045d562866ffd7bfa54d27eab92a77
https://doi.org/10.1364/aio.2019.t2a.3
https://doi.org/10.1364/aio.2019.t2a.3
Autor:
David L. Dickensheets, Sarah J. Lukes
Publikováno v:
Journal of Microelectromechanical Systems. 22:94-106
This paper describes two surface micromachining processes, i.e., one using a wet-etch release and the other using a dry-etch release, to create deformable membrane mirrors made from a thin film of low-stress SU-8 2002. The mirrors are designed for el
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f12694ce2cebe190b95aa5d90b7fd187
https://doi.org/10.1109/jmems.2012.2215010
https://doi.org/10.1109/jmems.2012.2215010
Autor:
David L. Dickensheets, Sarah J. Lukes
Publikováno v:
SPIE Proceedings.
We present the use of a large stroke deformable membrane mirror for focus control over a range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is much faster than lens or stage translation allowing synchronization to x-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ddace42d44672f3afe1beed5335a52c0
https://doi.org/10.1117/12.2042249
https://doi.org/10.1117/12.2042249
Publikováno v:
Applied Optics. 55:5208
Electrostatically actuated deformable mirrors with four concentric annular electrodes can exert independent control over defocus as well as primary, secondary, and tertiary spherical aberration. In this paper we use both numerical modeling and physic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::42a68bacd42a8b0b77f51bc7da72445f
https://doi.org/10.1364/ao.55.005208
https://doi.org/10.1364/ao.55.005208
Autor:
Sarah J. Lukes, David L. Dickensheets
Publikováno v:
2012 International Conference on Optical MEMS and Nanophotonics.
We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::71185d563c4f75541f8c0b43d68a0484
https://doi.org/10.1109/omems.2012.6318846
https://doi.org/10.1109/omems.2012.6318846
Autor:
David L. Dickensheets, Sarah J. Lukes
Publikováno v:
SPIE Proceedings.
We present the use of a large-stroke deformable membrane mirror at 45° incidence to achieve a very compact optical system capable of fast multi-layer focusing in an optical disc unit. The MEMS mirror replaces a lens translation mechanism and liquid
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8ae80ccd40f4a3f21071e8fc6735d875
https://doi.org/10.1117/12.910632
https://doi.org/10.1117/12.910632
Publikováno v:
SPIE Proceedings.
In this paper we describe a process for creating thin SU-8 2002 films between 1.5 μm and 3.0 μm thick that are hardbaked and can withstand a release etch in either aqueous or plasma silicon etchants. Resulting films are characterized using both waf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b793a2849186eefab2b4eb19a83a3d88
https://doi.org/10.1117/12.910967
https://doi.org/10.1117/12.910967
Autor:
David L. Dickensheets, Sarah J. Lukes
Publikováno v:
SPIE Proceedings.
SU8-2002 deformable membrane mirrors for primary focus control and compensation of focus-induced spherical aberration have been fabricated using a surface micromachining process with dry etching of silicon in XeF 2 . This process has a higher yield a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b41d8d105b94ceefd1df707e4c4ea30b
https://doi.org/10.1117/12.877077
https://doi.org/10.1117/12.877077
Autor:
David L. Dickensheets, B. Jeffrey Lutzenburger, Sarah J. Lukes, Brant M. Kaylor, Mohammad J. Moghimi
Publikováno v:
SPIE Proceedings.
This paper describes deformable membrane mirrors designed for focus control and aberration compensation in vital microscopy and shows microscope images obtained using these mirrors. The mirrors are metalized polymer membranes ranging from 1-3 mm in d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cfc7b9f11bcbc326e0850b8b489eac21
https://doi.org/10.1117/12.843874
https://doi.org/10.1117/12.843874
Publikováno v:
SPIE Proceedings.
We have built 1 mm circular and 1 mm × 1.4 mm elliptical surface micro-machined SU-8 2002 deformable mirrors for focus control. The SU-8 2002 membrane layers are 2.25 μm thick with gold as the reflective coating on their surfaces. Three annular ele
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa124ce8f62e0baf4c2075b88707a504
https://doi.org/10.1117/12.844292
https://doi.org/10.1117/12.844292