Zobrazeno 1 - 10
of 56
pro vyhledávání: '"Sarah Zerbini"'
Publikováno v:
Springer Handbook of Semiconductor Devices ISBN: 9783030798260
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1dbefce7f1527e4edc9e516d654721a6
https://doi.org/10.1007/978-3-030-79827-7_18
https://doi.org/10.1007/978-3-030-79827-7_18
Publikováno v:
Silicon Sensors and Actuators ISBN: 9783030801342
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cf9b7ab6d065a4e5e48231884c2947f2
https://doi.org/10.1007/978-3-030-80135-9_28
https://doi.org/10.1007/978-3-030-80135-9_28
Publikováno v:
Sensors, Vol 12, Iss 10, Pp 13985-14003 (2012)
In this paper, the mechanical response of a commercial off-the-shelf, uni-axial polysilicon MEMS accelerometer subject to drops is numerically investigated. To speed up the calculations, a simplified physically-based (beams and plate), two degrees of
Externí odkaz:
https://doaj.org/article/92eff2af04084ec5ab3fe9d666baa8e1
Publikováno v:
Sensors, Vol 9, Iss 1, Pp 556-567 (2009)
Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involves phenomena occurring at several length-scales. In this paper we present a multi-scale finite element approach to properly allow for: (i) the propagat
Externí odkaz:
https://doaj.org/article/0ec049d4e8f64b558828d4ec2c0a6866
Publikováno v:
Sensors, Vol 7, Iss 9, Pp 1817-1833 (2007)
The effect of accidental drops on MEMS sensors are examined within the frame-work of a multi-scale finite element approach. With specific reference to a polysilicon MEMSaccelerometer supported by a naked die, the analysis is decoupled into macro-scal
Externí odkaz:
https://doaj.org/article/0578dbf218074c4f824098a923338cef
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the k
Publikováno v:
Journal of Microelectromechanical Systems. 24:2019-2026
We analyze and test a microelectromechanical systems (MEMS) shock sensor that switches from a first stable state to a second stable state when subjected to an acceleration exceeding a fixed value. The transition between the two states is obtained bec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::05fc5bcc9de7ca28102738f4c4605176
https://doi.org/10.1109/jmems.2015.2462736
https://doi.org/10.1109/jmems.2015.2462736
Publikováno v:
Journal of Microelectromechanical Systems. 24:1077-1084
This paper describes capacitive sensing stators for microelectromechanical systems (MEMS) suitably designed to minimize damping effects without worsening the capacitive variation per unit displacement. Such optimization can be exploited to maximize t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9fdeb24fd930b431a60ccbc3602a13ac
https://doi.org/10.1109/jmems.2014.2381515
https://doi.org/10.1109/jmems.2014.2381515
Autor:
Antonio Francesco Longoni, Giacomo Laghi, Stefano Dellea, Sarah Zerbini, Giacomo Langfelder, Paolo Minotti, Alessandro Tocchio
Publikováno v:
Sensors and Actuators A: Physical. 229:218-226
The work presents a microelectromechanical system (MEMS) based magnetometer, targeting compass applications performance, which measures magnetic fields along an in-plane direction. The magnetometer is fabricated with the surface micromachining proces
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::71079bd8743b76824f2feb9841f6698f
https://doi.org/10.1016/j.sna.2015.01.027
https://doi.org/10.1016/j.sna.2015.01.027
Autor:
Giacomo Laghi, Sarah Zerbini, Giacomo Langfelder, Antonio Francesco Longoni, Alessandro Tocchio, Stefano Dellea, Paolo Minotti
Publikováno v:
Procedia Engineering. 87:819-822
The work presents a MEMS magnetometer for compass applications, which measures magnetic fields along an in-plane direction. The magnetometer is built with the surface micromachining process used for consumer gyroscopes, accelerometers, and recently p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d0e57a6730205c0e0469818a91834c6c
https://doi.org/10.1016/j.proeng.2014.11.275
https://doi.org/10.1016/j.proeng.2014.11.275