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pro vyhledávání: '"Santiago Antonio Cabañas Tay"'
Autor:
Mario Moreno, Alfredo Morales Sánchez, Santiago Antonio Cabañas Tay, José Juan Avilés Bravo, Karla Esther González Flores, Javier Flores Méndez, Liliana Palacios Huerta
Publikováno v:
Materials
Volume 14
Issue 21
Materials, Vol 14, Iss 6582, p 6582 (2021)
Volume 14
Issue 21
Materials, Vol 14, Iss 6582, p 6582 (2021)
Two multilayer (ML) structures, composed of five layers of silicon-rich oxide (SRO) with different Si contents and a sixth layer of silicon-rich nitride (SRN), were deposited by low pressure chemical vapor deposition. These SRN/SRO MLs were thermally
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a575d4811e7b7a876f49a0da6eeacb17
https://pubmed.ncbi.nlm.nih.gov/34772107
https://pubmed.ncbi.nlm.nih.gov/34772107
