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pro vyhledávání: '"Sanjin Xu"'
Publikováno v:
Journal of Alloys and Compounds. 791:773-778
Indium-aluminum-zinc oxide (IAZO) films and thin film transistors (TFTs) were prepared at different substrate temperatures by RF magnetron sputtering. Both the unannealed and annealed IAZO films exhibited an amorphous state with very flat surface top
Publikováno v:
IEEE Transactions on Electron Devices. 66:2219-2223
High-performance In–Al–Zn–O (IAZO) films and thin film transistors (TFTs) were fabricated using RF magnetron sputtering. The influence of sputtering power (90–250 W) on the film properties and device performance was investigated. All the IAZO