Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Sangmin Hwang"'
Air shield system to reduce lens contamination in optical lithography based on turbulence simulation
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 21
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d3639b9900def72d02556acf9bf2b738
https://doi.org/10.1117/1.jmm.21.4.043801
https://doi.org/10.1117/1.jmm.21.4.043801
Autor:
Hyejung Choi, Jaeyun Yi, Sangmin Hwang, Sangkeum Lee, Seokpyo Song, Seunghwan Lee, Jaeyeon Lee, Donghee Son, Jinwon Park, Suk-Ju Kim, Ja-Yong Kim, Sunghoon Lee, Jiwon Moon, Choidong Kim, Jungwoo Park, Moonsig Joo, JaeSung Roh, Sungki Park, Sung-Woong Chung, Junghoon Rhee
Publikováno v:
2011 3rd IEEE International Memory Workshop (IMW); 2011, p1-4, 4p
Autor:
Jaeyun Yi, Hyejung Choi, Seunghwan Lee, Jaeyeon Lee, Donghee Son, Sangkeum Lee, Sangmin Hwang, Seokpyo Song, Jinwon Park, Sookjoo Kim, Wangee Kim, Ja-Yong Kim, Sunghoon Lee, Jiwon Moon, Jinju You, Moonsig Joo, JaeSung Roh, Sungki Park, Sung-Woong Chung, Junghoon Lee
Publikováno v:
2011 Symposium on VLSI Technology (VLSIT); 2011, p48-49, 2p