Zobrazeno 1 - 10
of 77
pro vyhledávání: '"Sang-Hun Seo"'
Publikováno v:
Current Applied Physics. 18:1436-1440
SiN and SiCN film production using plasma-enhanced atomic layer deposition (PE-ALD) is investigated in this study. A developed high-power and high-density multiple inductively coupled plasma (multi-ICP) source is used for a low temperature PE-ALD pro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ab34c4a9141f7dcdff3c5dfc85f2d249
https://doi.org/10.1016/j.cap.2018.08.012
https://doi.org/10.1016/j.cap.2018.08.012
Publikováno v:
Journal of Applied Physics; 10/15/2005, Vol. 98 Issue 8, p083302, 11p, 1 Diagram, 12 Graphs
Publikováno v:
Journal of Applied Physics; 8/15/2005, Vol. 98 Issue 4, p043301, 7p, 1 Diagram, 7 Graphs
Autor:
Sang-Hun Seo, Hong-Young Chang
Publikováno v:
Journal of Applied Physics; 8/1/2004, Vol. 96 Issue 3, p1310-1317, 8p, 7 Graphs
Publikováno v:
Journal of Applied Physics; 7/1/2004, Vol. 96 Issue 1, p57-64, 8p, 1 Diagram, 9 Graphs
Publikováno v:
Thin Solid Films. 518:6573-6577
The electronegativity in a continuous wave (CW) and pulsed mode plasmas was calculated using the measured results of both the single Langmuir probe and the retarding field analyzer. For the pulsed mode measurement, both of the measurements were perfo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28673cb017acdf52e6a46efe82ad6386
https://doi.org/10.1016/j.tsf.2010.02.076
https://doi.org/10.1016/j.tsf.2010.02.076
Publikováno v:
Surface and Coatings Technology. 202:5298-5301
A novel pulsing technique has been proposed to enhance the deposition rate of film in high power pulsed magnetron sputtering (HPPMS). The detailed investigations on the temporal behavior of the plasma density have been done. The results have provided
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8853c9e8e05ffaa3628b8a088dd6206a
https://doi.org/10.1016/j.surfcoat.2008.06.141
https://doi.org/10.1016/j.surfcoat.2008.06.141
Publikováno v:
Plasma Sources Science and Technology. 15:256-265
The spatiotemporal evolution of the electron energy distribution function (EEDF) and of plasma parameters such as the electron density, the electron temperature and the plasma and floating potentials has been investigated using spatially and temporal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::15ceffe5da0a470ac897b97994774b1c
https://doi.org/10.1088/0963-0252/15/2/011
https://doi.org/10.1088/0963-0252/15/2/011
Publikováno v:
Current Applied Physics. 6:235-238
A new type plasma source has been developed for the generation of low temperature plasma. The plasma generation process consists of two steps, the generation of metastable neutral gas by injecting a low energy electron beam (the thermionic source) an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a83ada8e0bf61fc36596c045cf7e71c
https://doi.org/10.1016/j.cap.2005.07.047
https://doi.org/10.1016/j.cap.2005.07.047
Publikováno v:
Plasma Sources Science and Technology. 14:576-580
The temporal behaviour of the electron energy distribution function (EEDF) and the plasma parameters such as electron density, electron temperature and plasma and floating potentials in a mid-frequency pulsed dc magnetron plasma are investigated usin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6f013d11f06ea6275c213977ef23032b
https://doi.org/10.1088/0963-0252/14/3/021
https://doi.org/10.1088/0963-0252/14/3/021