Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Sandy, Peterhänsel"'
Publikováno v:
Fifth International Conference on Optical and Photonics Engineering.
The characterization of nanoscale grating asymmetries is an indispensable prerequisite for improving the accuracy of process control in modern semiconductor lithography. Model-based scatterometry is the state-of-the-art optical waferinspection techni
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5b743894dd4167091c7d8b2f84f1a5f7
https://doi.org/10.1117/12.2269167
https://doi.org/10.1117/12.2269167
Publikováno v:
SPIE Proceedings.
Optical metrology of grating parameters with small scattering volumes, such as side wall angles (SWAs), is an indispensable prerequisite for accurate process control in modern semiconductor lithography. However, current scatterometric technologies su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa6550a32dac3447991e46d386097c32
https://doi.org/10.1117/12.2230380
https://doi.org/10.1117/12.2230380
Publikováno v:
SPIE Proceedings.
We propose a measurement technique which enables the precise determination of side wall angles (SWAs) with absolute values below 1°. Our simulations show that a differentiation between asymmetric SWAs is also possible. The grating structure under in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::29f038860afc30fa6d68259d1587824f
https://doi.org/10.1117/12.2218824
https://doi.org/10.1117/12.2218824
Autor:
Sandy, Peterhänsel, Maria Laura, Gödecke, Valeriano Ferreras, Paz, Karsten, Frenner, Wolfgang, Osten
Publikováno v:
Optics express. 23(19)
With the help of simulations we study the benefits of using coherent, phase-structured illumination to detect the overlay error in resist gratings fabricated by double patterning. Evaluating the intensity and phase distribution along the focused spot
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::39b456eea80548ee58be36c4348bb84c
https://pubmed.ncbi.nlm.nih.gov/26406630
https://pubmed.ncbi.nlm.nih.gov/26406630
Publikováno v:
Optics letters. 39(13)
We study errors that occur in geometry and phase reconstruction when using scalar diffraction theory in line gratings with periods below 10 μm. The application of those gratings in so-called computer-generated holograms in high-precision interferome
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bf87dea307642cb45be8f9b3b581efa4
https://pubmed.ncbi.nlm.nih.gov/24978731
https://pubmed.ncbi.nlm.nih.gov/24978731
Autor:
Sandy Peterhänsel, Markku Kuittinen, Hannu Laamanen, Jari Turunen, Wolfgang Osten, Christof Pruss, Jani Tervo
Publikováno v:
Optics letters. 39(12)
We make use of the color sensitivity of the naked human eye to solve the inverse grating problem. We conduct color-matching experiments between simulated colors and the color of the zero diffraction order, and show that human color vision may reveal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b2ec20d51629b609acb6659ffc73abd8
https://pubmed.ncbi.nlm.nih.gov/24978533
https://pubmed.ncbi.nlm.nih.gov/24978533
Publikováno v:
Fringe 2013 ISBN: 9783642363580
We measured the coherence matrix of the spatially partially coherent light produced by a broad area laser diode (BALD) with Young’s double slit experiment using a spatial light modulator (SLM). With this data we modeled the behavior of the laser be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::317f400e7414a0d293ecccb1269b19fd
https://doi.org/10.1007/978-3-642-36359-7_163
https://doi.org/10.1007/978-3-642-36359-7_163
Publikováno v:
Fringe 2013 ISBN: 9783642363580
The requirements for diffractive elements (DOE) used in interferometric measurement techniques are increasing. To achieve the targeted accuracy of a few nanometers, the generated phase of the DOE has to be controlled or known down to values of λ/100
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::99f99a184ba794a7c8846a22e9e77a57
https://doi.org/10.1007/978-3-642-36359-7_64
https://doi.org/10.1007/978-3-642-36359-7_64
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 15:044005
Phase-structured illumination is investigated as a possible extension of scatterometric measurement methods for silicon line gratings. This is done by means of rigorous simulations. Special emphasis is put on the capability of this approach to detect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7efb2ff3e64e4b8d024503c316a5e2ef
https://doi.org/10.1117/1.jmm.15.4.044005
https://doi.org/10.1117/1.jmm.15.4.044005
Autor:
Sandy Peterhänsel, Kotaro Obata, Boris N. Chichkov, Wolfgang Osten, V. Ferreras Paz, Ka. Frenner, Aleksandr Ovsianikov
Publikováno v:
SPIE Proceedings.
Recently Fourier-Scatterometry has become of increasing interest for quantitative wafer metrology. But also in other fields the fast and precise optical characterization of periodical gratings of sub 100 nm size is of great interest. We present the a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::613a020fa39aa4ffae2c66e3b52a12b5
https://doi.org/10.1117/12.889439
https://doi.org/10.1117/12.889439