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Autor:
Christine Morin, Yann Mazel, Jean-Philippe Michel, Sylvie Favier, Claudiu V. Falub, Sandrine Perraudeau, Rachid Hida, Zineb Saghi
Publikováno v:
Journal of Magnetism and Magnetic Materials. 453:211-219
Thin films based on layers of Fe52Co28B20 (at%), Fe65Co35 (at%), and Ni80Fe20 (at%) were deposited by sputtering on 8″ bare Si and Si/200 nm-thermal-SiO2 wafers by simultaneous use of two or more cathodes. Due to the continuous rotation of the subs