Zobrazeno 1 - 3
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pro vyhledávání: '"Sandra R. Dupuis"'
Publikováno v:
Journal of The Electrochemical Society. 144:3169-3174
This paper discusses the effect of varied humidity on lithographic performance during photoresist exposure. In the presence of water, exposure causes the sensitizer to be converted into acid; without water, a less soluble ester forms. The effect of h
Publikováno v:
SPIE Proceedings.
Astigmatism in the modem scanning electron microscope (SEM) is a leading cause oftool drift and poor precision. A straightforward and productive way of assessing astigmatism in an SEM involves determining the best focus settings for neighboring sets
Autor:
Reginald R. Bowley, James E. Beecher, Sandra R. Dupuis, Dewey L. Farrington, Robert M. Cogley
Publikováno v:
SPIE Proceedings.
The control of critical dimensions is of primary importance in a semiconductor manufacturing line. While the use of level- dedicated CDSEMs assures maximum process control, it is preferable to use multiple CDSEMs interchangeably to minimize the effec