Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Samuel C. Howells"'
Autor:
Bruce E. Adams, Aaron Muir Hunter, Samuel C. Howells, Stephen Moffatt, Theodore P. Moffitt, Abhilash J. Mayur, Ben Ng, Jiping Li
Publikováno v:
11th International Workshop on Junction Technology (IWJT).
Several decades of research into understanding the mechanisms responsible for diffusion and activation of group-III acceptor and group-V donor impurities in silicon has been driven by the technological need for creating electrical junctions in the S/
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5336937e5f48609bed294a25d3da45a8
https://doi.org/10.1109/iwjt.2011.5970015
https://doi.org/10.1109/iwjt.2011.5970015
Autor:
Asher Klatchko, Samuel C. Howells, B. Skyborg, Michael E. Ungureit, Michael White, Thomas E. Chabreck, Robin Teitzel, Peter Pirogovsky, Cris Morgante, John Hubbard, Paul C. Allen, Andrew Berwick
Publikováno v:
SPIE Proceedings.
The ALTA 4300 system has been used to successfully write many advanced designs previously only possible with 50kV VSB systems. In order to further enlarge the application space of this high productivity system, an aerial image enhancement technique h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3a644ebb3d9c477ae88903e3deebf46c
https://doi.org/10.1117/12.557806
https://doi.org/10.1117/12.557806
Autor:
Peter Pirogovsky, Asher Klatchko, Boaz Kenan, Paul C. Allen, Alex Buxbaum, Samuel C. Howells, Michael White, Robin Teitzel
Publikováno v:
SPIE Proceedings.
The ALTA 4300 system has been used to successfully write many advanced design layers previously only feasible with 50kV vector shaped beam tools. In order to further enlarge the application space of this high productivity an aerial image enhancement
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1d226d4b47f1da61e3ba2db6dc11499c
https://doi.org/10.1117/12.518218
https://doi.org/10.1117/12.518218