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pro vyhledávání: '"Samantha Donavan"'
Autor:
Thomas A. Wassick, John P. Cincotta, Oswaldo Chacon, Theo Anemikos, Hugues Gagnon, Robert Martel, Charles Carey, Samantha Donavan, Zhuo-Jie Wu, Patrick Justison, Doug Hunt
Publikováno v:
2018 IEEE 68th Electronic Components and Technology Conference (ECTC).
To enable higher computing power in a single chip, there is demand for increasing die size for high performance applications in advanced nodes. Due to the weak mechanical properties of the low-k and ultra low-k (ULK) dielectrics in advanced technolog