Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Salini Datta"'
Publikováno v:
AIP Advances, Vol 14, Iss 1, Pp 015046-015046-14 (2024)
This work systematically studies a capacitively coupled plasma (CCP) source using experiments and 1-D COMSOL simulations relevant to Ar plasmas. Two radio frequency compensated Langmuir probes (LPs) and optical emission spectroscopy (OES) were purpos
Externí odkaz:
https://doaj.org/article/df26e757561042e8a42924c063d007bb
Autor:
Sukhen Das, Shilpa Maity, Shiladitya Banerjee, Krishanu Chatterjee, Megha Mishra, Salini Datta
Publikováno v:
Polymers for Advanced Technologies. 32:1409-1427
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6fc1fa9751ff7ae95bf6908635d5d7a9
https://doi.org/10.1002/pat.5193
https://doi.org/10.1002/pat.5193