Výsledky vyhledávání - "Salhab, Abbas"

Analysis of Wetting Transition and Pattern Collapse During the Drying Process of Deep Trench Isolation Structures Using Ultra-High Frequency Acoustic Waves and SEM Imaging

Autor: Salhab, Abbas, Carlier, Julien, Toubal, Malika, Campistron, Pierre, Neyens, Marc, Nongaillard, Bertrand, Thomy, Vincent

Publikováno v: 16ème Congrès Français d'Acoustique, CFA2022
16ème Congrès Français d'Acoustique, CFA2022, Société Française d'Acoustique; Laboratoire de Mécanique et d'Acoustique, Apr 2022, Marseille, France
16ème Congrès Français d'Acoustique, CFA 2022
16ème Congrès Français d'Acoustique, CFA 2022, Société Française d'Acoustique; Laboratoire de Mécanique et d'Acoustique, Apr 2022, Marseille, France
16ème Congrès Français d'Acoustique, CFA 2022, Apr 2022, Marseille, France

International audience; Removing contaminants from silicon wafers surface is an important part in the semi-conductors industry. Wet cleaning processes are essential steps as they are used after each operation (lithography, etching, etc…) in order t

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::0fbf8696ea63ac33ce24c0b272deb1fc
http://hdl.handle.net/20.500.12210/78492

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Caractérisation dynamique de l'état de mouillage et de séchage de structures DTI(Deep Trench Isolation) par ondes ultrasonores haute fréquence

Autor: Salhab, Abbas

Publikováno v: Micro and nanotechnologies/Microelectronics. Université Polytechnique Hauts-de-France, 2022. English. ⟨NNT : 2022UPHF0008⟩

In the semiconductor industry, effective wet cleaning of contamination is a critical factor in ensuring good quality of electronic products. The cycle between the wetting and drying processes can create several problems in the high aspect ratio micro

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od______4254::36d1e3561c7a00d2dc7ce5b4d71cbafb
https://theses.hal.science/tel-03663964

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Dynamic characterization of micro/nanostructures wetting using high frequency acoustic waves

Autor: Salhab, Abbas

Publikováno v: Small-scale elastic metrology using high-frequency acoustic waves
Small-scale elastic metrology using high-frequency acoustic waves, Oct 2020, Online workshop only, France

ST-IEMN common laboratory PhD workshop program 2020; International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od______4254::912f87862b14f71bec77eef233320a04
https://uphf.hal.science/hal-03591130

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Periodical

Polydimethylsiloxane Micro-Channels Application for the Study of Dynamic Wetting of Nano-Etched Silicon Surfaces Based on Acoustic Characterization Method

Autor: Salhab, Abbas Ramez, Carlier, Julien, Campistron, Pierre, Neyens, Marc, Toubal, Malika, Nongaillard, Bertrand, Thomy, Vincent

Publikováno v: Diffusion and Defect Data Part B: Solid State Phenomena; February 2021, Vol. 314 Issue: 1 p143-149, 7p

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