Výsledky vyhledávání - "Saidjafarzoda Ilhom"

Low-temperature synthesis of crystalline vanadium oxide films using oxygen plasmas

Autor: Adnan Mohammad, Krishna D. Joshi, Dhan Rana, Saidjafarzoda Ilhom, Barrett Wells, Brian Willis, Boris Sinkovic, A. K. Okyay, Necmi Biyikli

Publikováno v: Journal of Vacuum Science & Technology A. 41:032405

Vanadium oxide (VOx) compounds feature various polymorphs, including V2O5 and VO2, with attractive temperature-tunable optical and electrical properties. However, to achieve the desired material property, high-temperature post-deposition annealing of

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a0fb696caef27848b0ab43b5b296dc50
https://doi.org/10.1116/6.0002383

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Low-Temperature As-Grown Crystalline β-Ga2O3 Films via Plasma-Enhanced Atomic Layer Deposition

Autor: Necmi Biyikli, John Grasso, Saidjafarzoda Ilhom, Ali Kemal Okyay, Deepa Shukla, Brian G. Willis, Adnan Mohammad

Publikováno v: ACS Applied Materials & Interfaces. 13:8538-8551

We report on the low-temperature growth of crystalline Ga2O3 films on Si, sapphire, and glass substrates using plasma-enhanced atomic layer deposition (PEALD) featuring a hollow-cathode plasma source. Films were deposited by using triethylgallium (TE

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a44786f6a181d629d5a85f8f8c25dda1
https://doi.org/10.1021/acsami.0c21128

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Low-Temperature Self-Limiting Growth of Cubic Boron Nitride Via Hollow-Cathode Plasma-Enhanced Atomic Layer Deposition

Autor: Adnan Mohammad, Krishna Joshi, Saidjafarzoda Ilhom, John Grasso, Barrett Wells, Brian G Willis, Ali Okyay, Necmi Biyikli

Publikováno v: ECS Meeting Abstracts. :1128-1128

The two main polymorphs of boron nitride are hexagonal (h-BN) and cubic (c-BN) phases and both show attractive material properties to be employed under extreme environments. h-BN is also known as “white graphene” due to the matching hexagonal cry

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ba3548943bfc01129887e73f53f2799b
https://doi.org/10.1149/ma2022-02311128mtgabs

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Electrical and Optical Properties of P-Type NiO Films Grown Via Nickelocene Precursor in a Hollow-Cathode Plasma-ALD Reactor

Autor: Saidjafarzoda Ilhom, Adnan Mohammad, Peter Chardavoyne, Sofia Abdari, Dominic Zacharzewski, Martin Niemiec, Necmi Biyikli

Publikováno v: ECS Meeting Abstracts. :1116-1116

Electrical and Optical Properties of P-type NiO Films Grown via Nickelocene Precursor in a Hollow-Cathode Plasma-ALD Reactor In contrast to the relative abundance of as-grown unintentionally doped n-type semiconductor materials, there are only a few

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::44dd491d1032bd89880757e2638a834b
https://doi.org/10.1149/ma2022-02311116mtgabs

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In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors

Autor: Adnan Mohammad, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli

Publikováno v: Journal of Vacuum Science & Technology A. 40:042401

In this work, surface reactions during the atomic layer doping (ALDp) process of aluminum-doped zinc oxide (AZO) films have been studied. Conventional supercycle and alternative quasi-simultaneous codosing methods are analyzed within the 100–200 °

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::71ff421e60990d79404e143cfc74a7e0
https://doi.org/10.1116/6.0001772

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