Výsledky vyhledávání - "Sai Swaroop Yeddulapalli"

Automated rough line-edge estimation from SEM images using deep convolutional neural networks

Autor: Narendra Chaudhary, Sai Swaroop Yeddulapalli, Serap A. Savari

Publikováno v: Photomask Technology 2018.

We propose a deep convolutional neural network named EDGENet to estimate rough line edge positions in low-dose scanning electron microscope (SEM) images corrupted by Poisson noise, Gaussian blur, edge effects and other instrument errors and apply our

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0d4686ed8980e3518cd42f20ed2b253b
https://doi.org/10.1117/12.2501723

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Deep supervised learning to estimate true rough line images from SEM images

Autor: Narendra Chaudhary, Sai Swaroop Yeddulapalli, Serap A. Savari

Publikováno v: 34th European Mask and Lithography Conference.

We use deep supervised learning for the Poisson denoising of low-dose scanning electron microscope (SEM) images as a step in the estimation of line edge roughness (LER) and line width roughness (LWR). Our denoising algorithm applies a deep convolutio

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7a0b0667a21e32479a3dfaeb19b5ec51
https://doi.org/10.1117/12.2324341

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