Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Saeid Kheiryzadehkhanghah"'
Autor:
Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Inho Choi, Junbo Shim
Publikováno v:
Optical Technology and Measurement for Industrial Applications Conference 2022.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4e4e0f2a97711414fb5fc1a7afedd6f9
https://doi.org/10.1117/12.2660191
https://doi.org/10.1117/12.2660191
Autor:
Inho Choi, Vamara Dembele, Saeid Kheiryzadehkhanghah, Gukhyeon Hwang, Benjamin Charron, Jean-Francois Masson, Daesuk Kim
Publikováno v:
Applied optics. 61(26)
This paper describes a robust dynamic spectroscopic ellipsometer that can provide a highly accurate and reliable real-time spectroscopic polarization measurement capability for various in-line nanoscale measurement applications. The robustness of dyn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::86cd7b31cac9641363063e6ddf032535
https://pubmed.ncbi.nlm.nih.gov/36256365
https://pubmed.ncbi.nlm.nih.gov/36256365
Autor:
Gukhyeon Hwang, Inho Choi, Sukhyun Choi, Saeid Kheiryzadehkhanghah, Won Chegal, Sungtae Kim, Sangjun Kim, Robert Magnusson, Daesuk Kim
Publikováno v:
Optics Express. 31:19569
We describe a robust dynamic spectroscopic imaging ellipsometer (DSIE) based on a monolithic Linnik-type polarizing interferometer. The Linnik-type monolithic scheme combined with an additional compensation channel solves the long-term stability prob
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd6d315372e16dacaf5ea1abd5b02a11
https://doi.org/10.1364/oe.487111
https://doi.org/10.1364/oe.487111
Autor:
Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Chulmin Joo, Robert Magnusson
Publikováno v:
Optics letters. 47(5)
A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonst
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4ab86dd4457d378d6f7aad083ad46cfc
https://pubmed.ncbi.nlm.nih.gov/35230308
https://pubmed.ncbi.nlm.nih.gov/35230308
Autor:
Daesuk Kim, Gukhyeon Hwang, Sukhyun Choi, Vamara Dembele, Saeid Kheiryzadehkhanghah, Inho Choi, Chung Song Kim
Publikováno v:
Optical Technology and Measurement for Industrial Applications Conference 2021.
This paper describes a new approach for large-scale thin film thickness mapping based on dynamic spectroscopic ellipsometry. The proposed system can provide a real time thin film uniformity measurement capability with high precision. We expect the pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::963eb8c8fd4b80d7eb7790bd0c29af3a
https://doi.org/10.1117/12.2616271
https://doi.org/10.1117/12.2616271
Publikováno v:
Applied Optics. 60:10867
A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ba87025d5f0212dfbf10aeec2f07fc4b
https://doi.org/10.1364/ao.441657
https://doi.org/10.1364/ao.441657