Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Sae Na Park"'
Autor:
Keren J. Kanarik, Wojciech T. Osowiecki, Yu Lu, Dipongkar Talukder, Niklas Roschewsky, Sae Na Park, Mattan Kamon, David M. Fried, Richard A. Gottscho
Publikováno v:
Nature. 616:707-711
One of the bottlenecks to building semiconductor chips is the increasing cost required to develop chemical plasma processes that form the transistors and memory storage cells1,2. These processes are still developed manually using highly trained engin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::023a7ec1074df53d8fd27c7f3353fad4
https://doi.org/10.1038/s41586-023-05773-7
https://doi.org/10.1038/s41586-023-05773-7
