Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Sadanori Arae"'
Autor:
Motofumi Komori, Sadanori Arae, Soichi Inoue, Tetsuro Nakasugi, Koji Hashimoto, Ryoichi Inanami, Kazuya Fukuhara
Publikováno v:
Novel Patterning Technologies 2021.
We have developed Multi-Field Imprint (MFI) technology to improve the productivity of for nano-imprint lithography (NIL). Using the template having the imprinting size of 46 mm x 28 mm for MFI and the latest NIL system NZ2C (Canon Corp.), we successf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::29a847384bb7e5b221b0c54f53f32148
https://doi.org/10.1117/12.2583385
https://doi.org/10.1117/12.2583385
Autor:
Noritsugu Kanayama, Koji K. Okudaira, Masatoshi Tanaka, Kenta Hiraga, Takuhiro Kakiuchi, Kohtaro Yanase, Sadanori Arae, Kazuhiko Mase, Shinya Ohno, Rui Kanemura, Makoto Okusawa, Yosuke Ogashiwa
Publikováno v:
Journal of the Vacuum Society of Japan. 56:507-510
Sadanori Arae, Rui Kanemura, Kenta Hiraga, Yosuke Ogashiwa, Kohtaro Yanase, Noritsugu Kanayama, Shinya Ohno, Takuhiro Kakiuchi, Kazuhiko Mase, Koji K. Okudaira, Makoto Okusawa, and Masatoshi Tanaka 1 Yokohama National University, Yokohama 240-8501, J
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9c13e6d87dce2b3f058b61440d2ed720
https://doi.org/10.3131/jvsj2.56.507
https://doi.org/10.3131/jvsj2.56.507
Autor:
Shinya Ohno, Yuden Teraoka, Masahiro Morimoto, Akitaka Yoshigoe, Shoichi Ogata, Masatoshi Tanaka, Sadanori Arae, Kei Inoue, Tetsuji Yasuda, Hiroaki Toyoshima
Publikováno v:
Surface Science. 606:1685-1692
The initial oxidation on high-index silicon surfaces with (113) and (120) orientations at 820 K has been investigated by real-time X-ray photoemission spectroscopy (Si 2p and O 1s) using 687 eV photons. The time evolutions of the Si n + ( n = 1–4)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a2bec960e51aaaf0c4e2898262b46634
https://doi.org/10.1016/j.susc.2012.07.011
https://doi.org/10.1016/j.susc.2012.07.011
Autor:
Takahiko Yamazaki, Masatoshi Tanaka, Asuka Ishii, Sadanori Arae, Kazuhiko Mase, Makoto Okusawa, Kohtaro Yanase, Keita Ochi
Publikováno v:
Journal of the Vacuum Society of Japan. 55:403-404
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a4059320b0c0808c20a06ad1070517fa
https://doi.org/10.3131/jvsj2.55.403
https://doi.org/10.3131/jvsj2.55.403
Autor:
Koji K. Okudaira, Kazuhiko Mase, Rui Kanemura, Sadanori Arae, Kotaro Yanase, Yosuke Ogashiwa, Kenta Hiraga, Noritsugu Kanayama, Shinya Ohno, Makoto Okusawa, Yusaku Takano, Daiichiro Sekiba, Takuhiro Kakiuchi, Nariaki Shohata, Masatoshi Tanaka
Publikováno v:
Journal of the Physical Society of Japan. 83:094704
Decay processes of Si 2s core holes in a clean Si(111)-7 × 7 surface are investigated using coincidence measurements of Si Auger electrons and Si 2s photoelectrons at a photon energy of 180 eV. We show that Si 2s core holes exhibit two nonradiative
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ecf5e362574344ca9330ec27c98f3893
https://doi.org/10.7566/jpsj.83.094704
https://doi.org/10.7566/jpsj.83.094704
Autor:
Kazuhiko Mase, Kenta Hiraga, Sadanori Arae, Rui Kanemura, Yusaku Takano, Kotaro Yanase, Yosuke Ogashiwa, Nariaki Shohata, Noritsugu Kanayama, Takuhiro Kakiuchi, Shinya Ohno, Daiichiro Sekiba, Okudaira, Koji K., Makoto Okusawa, Masatoshi Tanaka
Publikováno v:
Journal of the Physical Society of Japan; 2014, Vol. 83 Issue 9, p094704-1-094704-5, 5p