Zobrazeno 1 - 2
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pro vyhledávání: '"Sadaki Nakamura"'
Autor:
Sadashige Horiguchi, Koichi Izumi, Shuzo Fujiwara, Sadaki Nakamura, Kunihiko Koike, Masaharu Nifuku
Publikováno v:
Journal of Loss Prevention in the Process Industries. 18:465-468
The explosive self-decomposition characteristics of gaseous ozone with a concentration of up to almost 100 vol% were quantitatively investigated using a closed system with an electric spark device. The lower self-decomposition (explosion) limit for o
Publikováno v:
Journal of Electronic Materials. 34:240-247
We investigated the ozone oxidation characteristics on a hydrogen-terminated Si substrate. A high-concentration ozone gas generator with an ozone condensation unit was specially designed and assembled for this study. During the oxidation by ozone wit